改良西门子法多晶硅生产中分离工艺的改进
温 雅,胡仰栋,单廷亮 (中国海洋大学化学化工学院,山东青岛266100)
摘要:对改良西门子法多晶硅生产中尾气分离工艺进行了改进。应用Aspen plus软件,利用精馏、吸收和吸附等不同分离方法进行组合,确定了尾气的分离序列,得到了操作条件温和的4个流程方案。用温焓图进一步分析各流程方案,发现各流程进行热匹配的意义不大,但分离过程所需的冷凝温度为250 K,易于实现。通过对比流程设备、吸收剂加入量、主要设备的操作压力、需公用工程加热与冷却的负荷等参数,确定了尾气分离的最佳流程。该流程的操作条件温和,且分离效果较好。
关键词:多晶硅;尾气分离;温焓图中图
分类号:TQ018
文献标识码:A Improvements of Separating Process in Polycrystalline Si Production by Modified Siemens Arts and Crafts WENYa, HUYang-dong, SHANTing-liang (Ocean University of China, Qingdao 266100, Shandong Province, China) Abstract:The separation process about deoxidizing stove tail gas in the modified siemens arts and crafts in polycrystalline silicon production was improved. Aspen plus software was applied to study the separation process of tail gas through combination of different separation method such as rectification, absorption, adsorption, etc, and the separation sequence of tail gas was fixed on, four flow blue prints under moderate operation conditions was put forward. Temperature-enthalpy diagramwas used to analyse every flowblue print furtherly, and found that there was little significance for heat matching of the four flows, but the lowest temperature requirement of the separation process was 250 K, which was easy to be realized. Through comparing flow equipment and parameters such as adding quantity of absorbent, operation pressure of major equipments, public works heating and cooling loads etc, the optimal flow blue prints was confirmed for the separation of tail gas. The flowwas characterized bymoderate operation condition and better separation effect. Key words:polycrystalline silicon; tail gas separation; temperature-enthalpy diag |
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